JTEKT THERMO SYSTEMS CORPORATION Developed New Models of Heat Treatment Equipment for SiC Power Semiconductors
Contributes to Improving Productivity in Contact Annealing and Activation Annealing

JTEKT THERMO SYSTEMS CORPORATION (headquarters: Tenri city, Nara Prefecture, President: Naoyuki Otomo, hereinafter referred to as "JTEKT THERMO SYSTEMS"), a subsidiary of JTEKT Corporation (headquarters: Kariya City, Aichi Prefecture, President: Yoshihito Kondo, hereinafter referred to as "JTEKT"), developed new models of heat treatment equipment that can significantly improve productivity in contact annealing and activation annealing of SiC Power Semiconductors.

Features of Contact Annealing System "RLA-4200-V "

JTEKT THERMO SYSTEMS has been manufacturing and selling contact annealing systems, such as "RLA-4100-V" and "RLA-3100-V", which can transfer wafers under vacuum and nitrogen atmospheres, winning favorable reviews from many customers and providing solutions to SiC power semiconductor manufacturing sites for many years.
However, since these heat treatment systems are single-wafer systems that process one wafer at a time, there has been a need for further productivity improvements.

Features of Activation Annealing System "VF-5300HLP (Latest model) "

VF-5300HLP is a batch processing equipment that can process multiple wafers in a cassette at a time. Last year JTEKT THERMO SYSTEMS developed the industry's first heat treatment equipment capable of processing 100 wafers of 6 inch / 8 inch at a time. Like this high productivity equipment, they have been providing solutions to semiconductor manufacturing industry.
And this time, they newly developed a mechanism that can reduces process time with re-designed transfer system. Previously heat treatment and cooling of wafers must be completed before the next lot of wafers were transferred. But the newly developed equipment can perform these tasks in parallel, reducing wasted time significantly and increasing productivity by 25% without changing foot print of equipment.

Future outlook

The need for improving productivity in semiconductor manufacturing, especially SiC power semiconductors, is expected to continue to increase in the future. JTEKT THERMO SYSTEMS will continue to propose thermal processing equipment developed using its competencies, as a solution to meet the needs of semiconductor manufacturers not only in Japan but also around the world.